中文摘要：

利用准分子激光等离子体技术，在紫外预电离XeCl准分子激光器上获得了最短1．58ns的短脉冲激光输出。实验中分析了聚焦到薄膜表面的光束能量密度对所产生的等离子体密度的影响，并对不同等离子体密度及维持时间情况下脉冲压缩效果进行了讨论，给出了激光器谐振腔在稳定腔及非稳腔两种工作方式下的实验结果。激光器在稳定腔工作时，脉宽可压缩至2．87ns采用非稳腔结构时，在脉冲能量不变情况下减小聚焦光斑面积，提高入射到薄膜表面的能量密度，得到了最短1．58ns的短脉冲激光输出。该技术适用于任何其它准分子器件。

英文摘要：

Using a laser created plasma switch, a 1.58 ns short output pulse from a UV-preionized XeCl excimer laser is obtained. The influence of the beam energy intensity focused on the film surface for the generated plasma density is analyzed. The pulse shorting effects of different plasma density and hold time are discussed, and the experimental results are presented with the resonant cavity operating in stable cavity and unstable cavity modes separately. Working in stable cavity mode, the pulse width can be narrowed to 2.87 ns. While in an unstable cavity mode, by reducing the focused beam area to improve the energy intensity, a 1.58 ns short output pulse is obtained. This technique can applied to any other excimer laser.