中文摘要：

利用日立SU70场发射扫描电镜对铝掺杂氧化锌（AZO）透明导电薄膜进行形貌观察.针对AZO薄膜特点,使用多种测试条件探讨了不同测试条件对薄膜形貌的影响.通过测试结果对比,获得了测定薄膜形貌的最佳条件.结果显示：加速电压为5 k V,工作距离为10 mm,探测器为混合探测器（Mix）,电子强度为high模式时,得到的扫描电镜图片最佳.

英文摘要：

In this paper, the morphology of transparent conductive aluminum-doped zinc oxide （AZO） thin film is observed using Hitach SU70 Scanning Electron Microscope（SEM）. Based upon the characteristics of AZO thin film, the various testing conditions are investigated and the influence of a variety of testing conditions on the morphology of the film is discussed. The results indicate that the accelerating voltage is 5 kV, the work distance is 10mm, the detector is Mix-detector and the electronic strength is set at high mode. Satisfying all the conditions stated afore, the best SEM images will be obtained.