中文摘要：

针对大曲率表面面形测量问题,提出一种单轴法线跟踪式测量方法。通过运用Collins公式,研究了倾斜角度对基于高斯光束测量系统的影响;通过理论分析和数值模拟,证明了在待测面倾斜的情况下,高斯光束与点光源作用下差动共焦系统的零位位置有明显不同;推导出高斯光束测量系统中针孔最佳尺寸和实际系统参数的关系,指出实验中波长为633nm测量系统的针孔最佳直径在20μm到35μm之间。

英文摘要：

A single-axis normal-tracking measurement system is proposed, which can solve the problem of measuring large curved surface. According to Collins formula, the tilt dependent error of the measurement system is studied, which uses Gaussian beam as the light source. By theoretical analysis and numerical simulation, the influence of the error is presented. The results show that there is the difference between point source and Gaussian beam for differential confocal microscopy. The opti-mal diameter of pinhole can be determined by the mathematical model and the actual parameters of the measurement system. The optimal pinhole diameter of this measurement system is 20 to 35 pm for 633 nm wavelength light source.