中文摘要：

为推动固态Marx发生器技术的研究和发展,介绍了近年来国内外学术界对固态Marx发生器技术的研究现状,重点分析了固态Marx发生器涉及的隔离充电技术、陡化技术以及负载能力等关键技术问题,并展望了其未来发展的趋势。固态Marx发生器的固态开关采用独立触发方式,每个开关可分别控制开通和关断,具有多参数特制、高频化、寿命长3方面的突出技术优势。通过采用隔离充电方式,可以实现低压充电电源和高压脉冲输出之间的电气隔离;通过陡化技术,可以实现数十ns脉冲上升沿输出;结合特定设计,固态Marx发生器可适用于驱动电阻、电容、电感以及它们的组合型非线性负载,在一定范围内调制出需要的电压、电流波形,具有较大的灵活性。伴随着半导体开关器件以及电力电子技术水平的发展,固态Marx发生器将向小型化、集成化和模块化方向发展,满足脉冲功率技术未来不断提高的应用需求。

英文摘要：

To promote the studies and application of solid-state Marx generators, we briefly introduce the latest research Status of solid-state Marx generators in recent academic world. After analyzing some key issues of solid-state Marx gene- rators including the isolated charging of capacitors, the pulse peaking, and the load capacity enhancement, we also discuss the future of solid-state Marx generators. Compared with the conventional Marx generator based on gas switches, sol- id-state Marx generators have three main advantages, namely, customizable parameters, high repetitive rate, and long lifetime, due to the independent closing and opening of solid-state switches. Different charging methods are adopted to realize the insulation between the low-voltage charging supply and the high-voltage pulsed output. With pulse peaking technology, the output pulses of Marx Generators can be modified to have rising edges of tens of nanoseconds. Using customized circuits with solid-state Marx generators can obtain specific voltage or current waveforms to fit for different loads such as resistance, capacitance, inductance, and their combinations with nonlinear characteristics. With the devel- opment of solid-state switches and power electronics, solid-state generators are developing to be increasingly miniaturized, integrated, and modularized, to support the fast growing demands of pulsed power applications.