中文摘要：

为了计算斜梁型电热微致动器的输出位移,基于电-热分析和热平衡原理建立了电热微致动器的电热耦合稳态传热方程.对热-结构进行了分析,运用力法原理建立了微致动器的位移计算模型.然后,用有限元法和实际测试对比验证了温度分布和输出位移的理论值,得到了一致性很好的结果.最后,分析了微致动器输出位移的保持性和重复性,以及结构参数和工艺对微致动器输出位移的影响.分析表明：斜梁的长宽比和倾角是影响微致动器输出位移的主要参数,工艺对输出位移有影响.实验结果表明：9V和18V电压下,微致动器的最大位移分别为0.85 μm和2.3 μm,与理论计算结果相对误差为2.2％和12.8％,实测值与理论值误差较小,表明本文推导的斜梁型电热微致动器的输出位移计算公式合理,能够为该类微致动器的设计和计算提供理论依据.

英文摘要：

To calculate the displacement of an inclined beam-type electrothermal microactuator,a multiphysics coupling model was established based on the electro-thermal and thermo-mechanical analysis.The thermal structure was analyzed,and the output displacement formula was obtained using the force method.For the purpose of proving the accuracy of the model,a comparison was performed.The comparison shows that the theoretical results of temperature profile and output displacement are in agreement well with the results of Finite Element Analysis（FEA） and experimental measurements.Finally,the output displacement repeatability and reproducibility were measured and the main factors influencing the output displacement of the microactuator were analyzed.Obtained results indicate that the ratio of length to width and the angle of the inclined beam are main influence factors on the output displacement and the different MEMS processes have obviously effects on the output displacement of the microactuator.Experimental results also show that the maximal displacement of the microactuator is 0.85μm and 2.3μm under the voltage of 18 V and 9 V,which means the relative errors with the results of theoretical calculation are 2.2％ and 12.8％ respectively.The above analysis indicates that the theoretic calculation values are coincident well with the measured values and the formulas deduced from the inclined beam-type electrothermal microactuator are logical,which can provide theoretical supports for the design and calculation of electrothermal microactuators.