中文摘要：

The combined micro arc oxidation(MAO)and a hybrid beam deposition process was used to deposit duplex(Si:N)-DLC/MAO coatings on AZ80 magnesium alloy.The microstructure and composition of the duplex coatings were analyzed by Raman spectroscopy,X-ray photoelectron spectroscope(XPS),scanning electron microscope(SEM)and atomic force microscopy(AFM).Tribological behaviors of the coatings were studied by ball-on-disk friction test.It was found that the ID/IG ratio of the(Si:N)-DLC(diamond-like carbon)top films increases with decreasing C2H2/N2ratio.The(Si:N)-DLC top film with Si3N4was formed on the MAO coated sample as the C2H2/N2ratio was 10sccm:5sccm,which showed an increasing critical load compared with the pure DLC directly deposited on the Mg alloy substrate.As a result,the(Si:N)-DLC/MAO coating exhibited an advanced wear protection for the substrate.

英文摘要：

The combined micro arc oxidation （MAO） and a hybrid beam deposition process was used to deposit duplex （Si：N）-DLC/MAO coatings on AZ80 magnesium alloy. The microstructure and composition of the duplex coatings were analyzed by Raman spectroscopy, X-ray photoelectron spectroscope （XPS）, scanning electron microscope （SEM） and atomic force microscopy （AFM）. Tribological behaviors of the coatings were studied by ball-on-disk friction test. It was found that the ID/IG ratio of the （Si：N）-DLC （diamond-like carbon） top films increases with decreasing C2H2/N2 ratio. The （Si：N）-DLC top film with SigN4 was formed on the MAO coated sample as the C2H2/N2 ratio was 10sccm：5sccm, which showed an increasing critical load compared with the pure DLC directly deposited on the Mg alloy substrate. As a result, the （Si：N）-DLC/MAO coating exhibited an advanced wear protection for the substrate.