钛酸铋基铁电薄膜具有优良的铁电、介电性能,在非挥发性存储器件方面有很好的应用前景。本文分别从制备工艺、掺杂改性、疲劳特性的研究等方面综述了最新的研究进展,并对当前研究中存在的问题进行了讨论。
BIT-based ferroelectric thin films have excellent ferroeLectric/dielectric properties and promising application prospect in non-volatile random access memory. In this article, the effects of doping and preparation on the properties of the thin films and the fatigue property researches are summarized. Furthermore, we discuss several problems of the current researches hased on the acquired research results.