中文摘要：

采用射频磁控溅射法,室温下在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的新型透明导电薄膜YZO（ZnO掺杂Y2O3简称YZO）。在薄膜厚度为600nm的情况下,研究了薄膜电学特性随溅射功率和溅射气压的变化情况。X射线衍射谱表明YZO薄膜是多晶膜,具有ZnO的六角纤锌矿结构,最佳取向为（002）方向。最佳溅射条件下制备的薄膜电阻率为8.71×10^-4Ω·cm,在可见光范围内平均透过率达到92.3%,禁带宽度为3.57eV。

英文摘要：

A new transparent conducting oxide （TCO） film with low resistivity and high transmittance in the visible range, yttrium-doped zinc oxide （YZO）, was successfully prepared by RF magnetron sputtering on glass substrates at room temperature. The dependence of the electrical property of the films on the deposition pressure and power was investigated. X-ray diffraction （XRD） pattern shows that the YZO film is polycrystalline with a hexagonal structure and has a preferred orientation along the c-axis. The film, with a low resistivity of 8.71×10^-4Ω·cm and a high transmittance of 92.3% in the visible range, has been obtained.