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中文摘要：
在平面微电极式结构的基础上，提出了一种新型薄膜气体传感器，其主要结构引用了离散阵列的概念，将传统的长方体型薄膜改进为由多条小长方体有间隔的并行排列的离散结构，使敏感薄膜具有了三维敏感效应。根据半导体气敏薄膜的扩散响应理论，对传感器的响应时间和灵敏度特性进行了理论分析，证明新型传感器具有响应时间更短、灵敏度更高的优点；并分析了薄膜厚度对传感器响应时间的影响。
英文摘要：
A novel film gas sensor is proposed based on the plane microelectrode structure, using the numerous small cuboids in turns instead of conventional planar film structure by citing the concept of discrete array. This development makes the film have the ability of 3D sensitive effect. According to the proliferation response theory of semiconductor film,a theoretical analysis is made on the sensitivity and response time of the sensor, which proves that the new sensor has an advantage over the conventional one on the response time and sensitivity. And effect of thickness of gas sensing thin film on gas response time is analyzed.
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