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Structure, mechanical and tribological properties of HfCxfilmsdeposited by reactive magnetron sputte
  • ISSN号：0169-4332Electronic Resource Number: 10.1016/s0169-4332(03)00702-5
  • 期刊名称：Applied Surface Science
  • 时间：2014.11.27
  • 页码：68-76
  • 相关项目：超硬纳米多层膜中应力调控及其对择优取向、相结构和超硬效应影响的研究
作者： Wang Shuo|Zhang Kan|An Tao|Hu Chaoquan|Meng Qingnan|Ma Yuanzhi|Wen Mao|Zheng Weitao|
同期刊论文项目
超硬纳米多层膜中应力调控及其对择优取向、相结构和超硬效应影响的研究
期刊论文 18
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