通过对比分析逆压电效应本构方程和热弹性体本构方程,将压电执行器的驱动电压比拟为温度载荷,压电应变系数比拟为正交各向异性的热膨胀系数,则叉指形电极压电执行器的静态位移可采用热弹性有限元法分析。由于叉指形电极的电场导致局部的非均匀和非线性,在热弹性比拟法中,需引入修正系数对热膨胀系数进行修正。数值算例和实验结果表明,热弹性比拟法在叉指形电极压电执行器的静态仿真中是简单有效的。
Based on the analogy analysis between the constitutive equation of converse piezoelectric effect and thermo-elastic effect,an actuation voltage has analogy to a thermal load,and piezoelectric strain coefficient has analogy to orthotropic thermal expansion coefficient.Then,the thermo-elastic finite element method can be employed to analyze the static displacement of the inter-digital electrodes of the piezo-actuator.A correction coefficient is introduced to modify the non-uniformity and nonlinearity caused by local electric field of the inter-digital electrodes.The numerical and experimental examples confirm that piezoelectric-thermal analogy approach is valid and simple.