中文摘要：

为了解决衍射光栅的表面精度,提高衍射效率,分析了衍射光栅刻划中金刚石刻划刀的定向与耐用度的关系,围绕光栅刻划刀磨制过程中如何解决振动这一关键问题,从工艺方面进行了探讨.通过确立金刚石刻划刀的定向,并在研磨过程中加以实施,使刻划刀的耐用度和寿命得到了提高.采取有效抑制导致刻划刀磨制环节中振动因素等手段,使刻划刀几个面和刀刃的粗糙度降低到0.006,刻制出的光栅衍射效率约提高了15%～20%.

英文摘要：

In order to increase the surface accuracy and diffraction efficiency of the diffraction grating, the relation between the orientation of the diamond graver and its life was analyzed. The key technology how to restrain the vibration of the diamond graver in the process of polishing it was discussed. The life of the diamond graver was lasted by selecting its orientation. By restraining the vibration of the graver, the roughness of its cutting edge surfaces was reduced to Ra 0.006 and the diffraction efficiency of the grating can be increased by a factor of 15%-20%.