中文摘要：

利用化学浴沉积法，以EDTA为络合剂，CuSO4·5H2O和Na2S2O3为前驱体溶液制备了硫化亚铜纳米薄膜，用FESEM、XRD、光学显微镜研究了前驱体浓度、络合剂的浓度、溶液的pH值、反应温度等因素对硫化亚铜纳米薄膜的表面形貌、晶粒大小与晶体结构的影响。结果表明，在最佳的生长条件下可以制备晶粒匀一、结构致密的硫化亚铜纳米薄膜，紫外可见吸收光谱表明硫化亚铜薄膜具有一定的透光性，并对红外光有很好屏蔽的作用。

英文摘要：

Nano-crystal Cu2S thin films were prepared by chemical bath deposition, with CuSO4·5H2O and Na2S2O3 as precursors, and EDTA as complexing agent. The characteristics of the Cuz S thin films deposited under different condition, the concentrations of precursors and complexing agent, pH value and deposition temperature were examined by means of FESEM, XRD and optical microscopy. The results indicate that the compact nano-crystal Cu2S thin films with uniform Cu2S nanoparticles can be obtained under the optimal depositing condition. UV-vis spectrum shows that the Cu2S film is translucent and holds efficient shielding effect on infrared light.