为了实现对传统谐振腔增强型(RCE)光探测器的优化,提出了一种具有双吸收结构的RCE光探测器。首先从理论上分析了它的量子效率和高速响应特性,然后将其与传统的RCE光探测器进行了比较。结果表明,双吸收结构RCE光探测器在保持高速响应特性的基础上,其量子效率较传统RCE光探测器得到了进一步提高。实验上成功制备了双吸收结构的RCE光探测器,其在1 525 nm波长处获得了63%的峰值量子效率。
A novel resonant-cavity-enhanced(RCE) photodetector based on dual-absorption structure is proposed to optimize the conventional RCE photodetector.Furthermore,its quantum efficiency and high speed response properties are also analyzed theoretically followed by a comparison between the RCE photodetector based on dual-absorption structure and the conventional one.All of the results indicate that the new design achieves a rather higher quantum efficiency while remaining the high speed response property compared with the conventional one.Eventually,the new designed photodetector,which attains a peak quantum efficiency of 63% around wavelength of 1 525 nm,is fabricated successfully.