中文摘要：

基于棱镜耦合衰减全反射和波导材料热光效应，利用聚合物薄膜平板波导作为温度传感器，论证了影响温度传感器灵敏度的各种因素．结合理论分析及实验验证，温度传感器灵敏度不仅与平板波导上包层及芯层厚度、聚合物材料光学损耗有关，而且与波导的导波模式阶数有关．结果表明，反映温度传感器反射率与温度关系灵敏度的斜率在反射率为零的某阶TE模式下，其值最高．因此，为提高传感器的灵敏度，传感器的入射光外角应选择在反射率为零的某阶TE模式下工作．该聚合物薄膜波导温度传感器具有灵敏度高、结构简单及易制作等特点．

英文摘要：

Based on attenuated total reflection （ATR） and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric （TE） mode. To improve the sensitivity of the temperature sensor, the sensor＇s working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.