中文摘要：

研究了X射线成像波带片的工作原理和制作工艺。从理论上分析了波带片的空间分辨率与最外环宽度的关系，以及波带片衍射效率与厚度和折射率的关系。利用国家同步辐射实验室发展的加工工艺，即电子束光刻技术和X射线光刻技术结合制作波带片。实验结果表明：波带片最外环宽度为150nm，高宽比为4，基本满足高分辨X射线成像波带片的高空间分辨率、大高宽比、高精度等要求。

英文摘要：

In order to investigate the principle and fabrication technique of Fresnel zone plates （FZPs）, a diffractive optical element used in X ray imaging with the best resolution currently is presented. A theoretical analysis of the spatial resolution depending on the outermost zone width is given. An analytical expression of the diffraction efficiency in terms of thickness and X ray refractive index of the zone plate is also provided. Electron beam lithography combined with X-ray lithography is employed to fabricate FZPs. Experimental results indicate that the outermost zone width is 150 nm and the aspect ratio is 4, which satisfies the X-ray imaging system requirements of high resolution, high aspect ratio as well as high precision.