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Electron density and ion energ
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  • 相关项目：低温等离子体辅助制备纳电子器件单元机理的研究
作者： Xi-Ming Zhu, Wen-Cong Chen, Sh
同期刊论文项目
低温等离子体辅助制备纳电子器件单元机理的研究
期刊论文 64 会议论文 55 著作 3
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