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The Etching Reaction and Surface Reconstruction of Bismuth Zinc Niobate Thin Film in SF6/Ar Plasma
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：2013.7
  • 页码：28-30
  • 相关项目：铁电薄膜微图形化及其电性能相关性研究
作者： WANG Shu-ya|FU Yun-ying|DAI Li-ping|ZHANG Guo-jun|
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