中文摘要：

介绍了一种可用于微流体操作的压电驱动式无阀微泵，设计了微泵结构并制作了样机。采用ANSYS软件进行有限元分析得到微泵的最佳工作频率。搭建了实验系统并做了相关实验，得到了微泵输出流量与驱动频率及电压的关系曲线。实验结果表明，无阀微泵具有结构简单，造价低和传输稳定等优点，适用于微流体操作。

英文摘要：

This paper described a piezoelectric valveless micropump developed to be the key devices of microfluids,the prototype of the micropump had been designed and manufactured. The vibration modes and the best work frequency were obtained by means of Finite Element Method. According the experimental results, the characteristic relations about excitation voltage and actuation frequency to the flux of micropump were verified. The experimental results demonstrated that the micropump was suitable for microfluids manipulation with many advantages, such as simple structure,low price,high reliability and so on.