中文摘要：

描述了一种应用于集成电路（IC）制造的超精密工件台的运动控制．介绍了超精密工件台主从控制原理，它结合了粗动台和精动台两者的优点以实现运动控制的大行程和高精度．给出了超精密工件台机电系统基于闭环控制的动力学辨识方法．利用环路整形技术，研究了串联PID控制器和鲁棒控制器的自动综合方法．仿真结果表明该超精密工件台的定位精度可达到10nm．

英文摘要：

Motion control system of a supper precision stage applied to IC（integrated circuit） production was presented. Master/slave control principle of the stage is that the merits of both coarse and fine stage are considered to obtain a desired motion control system having the capacity of large workspace with high resolution of motion. Identification method of mechatronics system such as ultra-precision stage is pictured based closed-loop control. The automated synthesis procedure of series PID （proportional, integral and derivative） controller and robust controller are studied using loop shaping