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Thermodynamic investigation of the gas-phase reactions in the chemical vapor deposition of boron car
  • ISSN号：0166-1280
  • 期刊名称：Journal of Molecular Structure-Theochem
  • 时间：0
  • 页码：103-116
  • 语言：英文
  • 相关项目：CVD/CVI制备SiC的气相反应机理研究
作者： Zeng, Qingfeng|Wang, Tao|Su, Kehe|Zhang, Litong|Zeng, Yan|Cheng, Laifei|Deng, Juanli|
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CVD/CVI制备SiC的气相反应机理研究
期刊论文 14 会议论文 13
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