中文摘要：

为实现对微器件等三维测量时在三维方向上任意单点的高精度触发定位，提出一种新型三维谐振触发定位系统。以石英音叉作为微力传感器，与一体式光纤微测杆测球相结合，利用其谐振参数（谐振振幅、谐振频率／谐振相位）对微力的高敏感性构建三维谐振触发测头。将该测头与三维纳米定位台、反馈控制模块、信号处理电路结合，分别构成完整的振幅反馈和相位反馈三维谐振触发定位系统。工作时驱动石英音叉测头处于谐振状态，检测顶端测球与试样表面接触微力引起的振幅变化或频率变化。测头顶端测球与试样表面在z向以轻敲模式接触，在X、Y，向以摩擦模式接触。实验结果显示：系统在x、y、z3个方向的触发分辨力分别达到0．17nm、0．20nm、0．18nm；三维重复性误差分别达到37．0nm、70．6nm、41．0nm。实验结果验证了提m的三维谐振触发定位系统纳米量级精确定位的可行性和有效性。

英文摘要：

In order to achieve high-precision three-dimensional trigger positioning of micro-devices at any single point in three-dimensional measurements, a new type of three-dimensional resonant trigger positioning system was devel- oped. The quartz tuning fork is used as the micro-force sensor, and combined with the integrated fiber micro-stem and micro-ball tip. A three-dimensional resonant trigger probe is constructed using the high sensitivity of its resonant pa- rameters （resonant amplitude, resonant frequency/resonant phase） to the micro-force. The probe is combined with the three-dimensional nano-positioning unit, feedback control module and signal processing circuit;the integrated am- plitude feedback and phase feedback three-dimensional resonant trigger positioning systems are built respectively. Un- der the signal driving, the quartz tuning fork is working in its resonant state, and the amplitude or frequency changes caused by the contact micro-force can be detected when the resonant probe touches the sample surface. The micro- ball tip of the probe contacts the sample surface in traditional tapping-mode in Z direction, and in friction-mode in both X and Y directions. Experiment results show that the trigger resolution is 0.17 nm in X direction ,0.20 nm in Y direction and 0. 18 nm in Z direction. The three-dimensional repeatability errors are 37. 0 nm, 70. 6 nm and 41.0 nm, respectively. The experiment results demonstrate the feasibility and effectiveness of nano-level precision po- sitioning for the proposed three-dimensional resonant trigger positioning system.