中文摘要：

通过液相沉积在云母表面制备1H,1H,2H,2H-全氟癸基三氯硅烷（FDTS）自组装单分子膜（SAMs）。室温下,将1.0 mmol·L^-1的FDTS溶液静置水解15 min,再把云母浸入自组装30 min,原子力显微镜（AFM）表征发现,液相沉积过程中FDTS的团聚现象得到有效解决。该方法制备出了高覆盖率（85%±2%）和低均方根粗糙度（0.58 nm）的FDTS SAMs,且单分子膜的生长过程符合Langmuir一级动力学吸附模型。在液相沉积过程中,若水解和组装同时进行,过长的水解时间（大于30 min）或组装时间（大于30 min）均会导致FDTS的团聚,进而极大降低SAMs的质量。

英文摘要：

In this work, 1H,1H, 2H,2H-perfluorodecyltrichlorosilane（FDTS） self-assembled monolayers（SAMs）were prepared using liquid-phase deposition. To prepare the FDTS SAMs, the FDTS solution was first hydrolyzed for 15 min at room temperature, and then mica was immersed into the FDTS solution for self-assembly for 30 min. It was confirmed that the new method can effectively prevent aggregation of FDTS in the liquid phase deposition using atomic force microscopy（AFM）. The FDTS SAMs were successfully prepared with a high surface coverage of（85% ± 2%） and low root mean square surface roughness（0.58 nm）. The growth process of the SAMs can be described using the Langmuir first-order adsorption kinetics model. However, if hydrolysis and assembly occur at the same time and these processes last more than 30 min, the FDTS would be aggregated in the liquid-phase deposition process, which would greatly reduce the quality of the SAMs.