中文摘要：

选择LabVIEW 8．2软件作为系统开发平台，设计实现了一个虚拟RHEED实验系统。概括了RHEED工作原理和样品砷化镓（GaAs（001）_（2×4））表面的不同结构模型，重点介绍了虚拟RHEED实验系统的设计思想及成果。该系统面向国内一流的大型实验仪器设备进行开发，具有一定科研创新价值，同时它在保证实验教学质量的前提下还大大节省了高校的实验耗费。

英文摘要：

A virtual RHEED experimental system is designed and implemented by LabVIEW 8.2 software. The RHEED principle and different structural models of the sample gallium arsenide （GaAs（001）_ （2 ×4）） surface is summarized. The design ideas and achievements of virtual RHEED experimental system is mainly introduced. The system guarantees the experimental teaching quality in the college and saves the experimental spent, so the study has some important practical significance. Moreover, the system relates with the large domestic first-class experimental equipment.