中文摘要：

参考有限元分析结果，建立了精密运动平台结构的多刚体离散元模型，依据模态实验结果进行模型验证和修正，利用所建模型分析直线非质心驱动，以及气浮支承作用点漂移对运动平台俯仰振动的影响，提出改进措施，为后续设计提供指导。

英文摘要：

We build the multi- rigid- body dis- crete element model of the precision motion stage reference to finite element analysis result, validate and update the model according to modal experi- mental results. The analysis on the influence of the driving force not being applied at the center of gravity and floating of air bearing action point on the pitching vibration of precision motion stage is taken with the built model, and improvement ap- proaches are proposed to guide subsequent design.