中文摘要：

在含亲二氧化碳链段聚二甲基硅氧烷（PDMS）的嵌段聚合物中，用超临界二氧化碳选择溶胀的方法得到了闭合的纳米孔。采用反应离子刻蚀，可以将聚合物膜内部的多孔结构暴露出来，然后用原子力显微镜和扫描电镜表征。结果表明，纳米孔的形成不是简单的PDMS纳米微区溶胀，而是由相邻纳米微区在超临界流体处理过程中合并以后形成的。纳米孔的密度和孔径分别为7．0×10^10／cm^2和20nm。

英文摘要：

Isolated nanocells were prepared in a poly（styrene-b-dimethylsiloxane） block copolymer film by scCO2 foaming. The embedded nanocellular structures can be exposed by reactive ion etching （RIE） and characterized by atomic force microscopy （AFM） and scanning electronic microscopy （SEM）. Such ceils may be formed by coalescence of the neighboring PDMS nano-domains during the process. The resultant nanocells have a density of 7.0 × 10^10/cm^2 and an average diameter of 20 nm. The fabrication of more complex structures using the same method but with different block fractions is currently under investigation.