中文摘要：

利用多靶磁控溅射法制备MoS_2基系列复合薄膜,通过扫描电子显微镜、X-ray衍射、拉曼光谱对薄膜微观形貌及晶体结构进行表征,利用纳米压入表征薄膜硬度及弹性模量,通过微动摩擦磨损试验对比分析了该系列薄膜在大气环境下的润滑性能.研究结果表明：MoS_2薄膜中复合C、Ti元素可有效抑制薄膜生长过程中柱状结构的形成,薄膜更为致密;复合薄膜的摩擦系数及磨损率显著降低.其中,MoS_2＋C＋Ti三元复合薄膜硬度为7.43 GPa,其弹性模量及弹性恢复量分别为98.1 GPa和61.7%.在大气环境（RH 35%~50%）下,法向载荷10 N时MoS_2＋C＋Ti薄膜具有最低的磨损率4.67×10–17 m~3/（N·m）,该薄膜在不同载荷的微动摩擦试验中均具有最好的承载力.

英文摘要：

MoS_2 based composite films were deposited using multiple targets magnetron sputtering method. The microstructure, mechanical and tribological properties of the films were investigated using the various analytical techniques. The results show that elements C and Ti in films effectively suppressed the growth of columnar structure and produced more compact films. Accordingly, composite films exhibited excellent mechanical properties and load-bearing capacity. In particular, among these composite films MoS_2＋C＋Ti film showed the highest hardness（7.43 GPa）, elastic modulus（98.1 GPa） and elastic recovery（61.7 %）, as well as the lowest wear rate about 4.67×10–17 m~3/（N·m） in ambient air.