中文摘要：

针对半导体及微纳制造等领域对微定位系统低成本高精度的要求,根据以宏观的输入获得微观的输出、低精度驱动器输入获得高精度输出的设计思想,设计了一种基于柔性铰链差式杠杆机构的低成本微定位平台。在该平台中,通过设计位移缩放机构,将驱动器的宏观输入位移进行比例缩小,实现平台的微观输出,降低微定位平台的成本。分析了微定位平台的刚度,并根据该平台定位机构所受载荷的不同,设计了两种不同的柔性铰链。在此基础上,建立了该平台的有限元分析模型,采用ANSYS对该平台的应力进行了分析,并对该平台的输出位移进行了仿真。仿真结果证明了该微定位平台的可行性。

英文摘要：

To meet the demands of low-cost and high accuracy for the micro-positioning system in the fields of such as semiconductor and micro/nano manufacturing, a low-cost micro-positioning stage was proposed based on differential lever mechanisms with flexure hinge, which utilized macro- displacement and low accuracy input will realize micro-displacement and high accuracy ouput. First, the macro-displacement of the actuator was scaled down to realize micro-displacement ouput by designing a zooming mechanism, thus reducing the cost of this stage. Second, the stiffness of this stage was analyzed, and two different flexure hinges were presented according to different load distributions in the positioning mechanisms. Finally, a finite element model of the stage was established, and the stress of the stage was analyzed using ANSYS software. In addition, the output displacement of this micro - positioning stage was implemented by simulation analysis. Simulation results show such a micro-positioning stage is feasible.