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中文摘要：
利用抽运-探测技术研究了皮秒激光脉冲诱导下Bi20Sb80（BiSb）薄膜的时间分辨反射率演化过程。利用原子力显微镜和椭圆偏振光谱仪研究了激光诱导开关前后薄膜微区的表面结构特征和光学特性。结果表明,在一定能量密度范围内的皮秒激光脉冲作用下,该薄膜具有快速光热开关特性,瞬态反射率变化的开关时间约为19 ns,且不随激光能量密度的变化而变化,在多次脉冲重复作用下具有较好的重复性和稳定性。表明BiSb薄膜有望用于超快光存储超分辨掩模结构中,这将为发展新型快速开关掩模材料和理解BiSb作为超分辨掩模的工作机理提供帮助。
英文摘要：
A pump-probe system is employed to observe transient reflectivity change process of Bi20Sb80（BiSb） films induced by picosecond laser pulses.Spectroscopic ellipsometry and atomic force microscopy are used to study the micro-area optical properties and surface structures of irradiated areas.Experimental results indicate that fast and recoverable switching can be achieved on BiSb films induced by single-shot or repeated picosecond laser pulses with a proper pumping fluence.The switching time is about 19 ns,which is independent on the laser fluences.The BiSb film is shown to be very promising for ultrafast super-resolution mask layer.These results are helpful for developing new mask layer materials with fast optical response and understanding the working mechanism of BiSb super-resolution mask layers.
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