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Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：2014.1.15
  • 页码：529-532
  • 相关项目：硅光伏材料内部纳米结构的制造及其吸收频谱的调控
作者： Vanthanh Khuat|Ma, Yuncan|Si, Jinhai|Chen, Tao|Chen, Feng|Hou, Xun|
同期刊论文项目
硅光伏材料内部纳米结构的制造及其吸收频谱的调控
期刊论文 23
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