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中文摘要：
原子氧对低地球轨道航天器部件材料的侵蚀及其地面环境模拟日益受到国际航天界的重视.高速飞行的航天器与迎面的空间环境原子氧之间相互作用能量约为5eV,在此能量范围内,原子氧束流与材料表面相互作用的许多物理和化学问题尚待从实验上认真研究,因此必需建立地面环境模拟装置.本文根据电子回旋共振(ECR)原理,利用微波的同轴传输与耦合,采用永磁体构成轴向不对称磁镜场产生会切磁场,降低了常规设计的磁场强度,缩小了装置的尺寸,同时采用无电极放电,避免了重金属杂质导入等离子体,研制出紧凑型纯净原子氧中性束流源.该装置易与真空容器联接.联机运行结果表明:该装置能够在10-1-10-3Pa的气压范围内稳定运行,通量密度达到3×1015atom/cm2@s,满足了原子氧环境地面模拟试验对装置小型化的要求.
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