中文摘要：

本文对可溶盐基片方法制备薄膜TEM样品进行了改进。改进后不仅保持了原可溶盐基片法方便、高效和快捷的特点,还可以根据表征需要获得薄膜在不同生长阶段微结构的样品。

英文摘要：

The soluble salt substrate method for thin film TEM sample preparation has been improved.The improved method not only retains the convenient and efficient features of the original method but additionally can provide sample microstructures in different growth stages according to characterization requirements.