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Effect of Krypton Addition on Electron Cyclotron Resonance-Radio Frequency Hybrid Oxygen Plasma for
  • 期刊名称：Plasma Science and Technology
  • 时间：0
  • 页码：31-34
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： CHEN Mudi|WANG Hongyong|DING Fang|WANG Lei|ZHOU Haiyang|ZHU Xiaodong|KE Bo|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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