中文摘要：

以La0.7Sr0.3FeO3为敏感材料，设计制成了一种新型的共平面结构气体传感器．基于有限元分析软件Ansys对该传感器结构进行了优化设计．实验测得该传感器对于500ppm浓度乙醇气体的灵敏度为8．0，功耗为261mW，是同种敏感材料烧结型传感器功耗的2／3，响应时间约为1．5s，恢复时间约为2．5s，是一种功耗低、灵敏度高、稳定性好的微结构乙醇气体传感器．

英文摘要：

This paper presents a novel micro-structure ethanol gas sensor. The heater electrodes and signal electrodes were designed on the same plane in order to reduce cross-talk and make the fabrication easier. The whole design has been simulated using a 3D electro-thermo-mechanical finite element model through Ansys. The nano complex oxide La0.7 Sr0.3 FeO3 is employed to act as sensitive material coated on the surface of the substrate. Experimental results show that the sensitivity of this novel sensor is 8.0 when the concentration of the ethanol is 500ppm, the power consumption is approximately two thirds of that of commercial sintering gas sensors, the response time is about 1. 5s, and the recovery time is about 2.5s.