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中文摘要：
以垂直腔面发射半导体激光器（VCSEL）为研究对象,采用Volterra方法结合速率方程理论,从器件设计角度,分析了在5 GHz微波信号模拟调制情况下出射面反射镜的反射率、有源区厚度和光限制因子对其二阶谐波失真、三阶谐波失真和三阶互调失真的影响。结果表明,对于垂直腔面发射半导体激光器,采取大反射率、小有源区厚度和小光限制因子有利于降低器件的谐波和互调失真。
英文摘要：
The second harmonic, third harmonic and third-order intermodulation distortions of vertical cavity surface emitting laser （VCSEL） at analog modulation were calculated using Volterra transfer function with the help of rate equations. Effects of the mirror reflectivity, the active material thickness and the optical confine factor on SHD, THD and IMD3 of VCSEL were analyzed considering the microcavity effects. The results show that high mirror reflectivity, low thickness of active material and small optical confine factor can decrease the harmonic and intermodulation distortions of VCSEL.
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