中文摘要：

为了实现高Q值极小模体积的表面等离子体微腔，提出一种混合表面等离子体微盘腔，介质微盘上放置横截面为矩形的金属纳米环形条，微盘腔中间由低折射率材料隔离．用有限元法对混合微腔的模式特性进行数值模拟，研究了其品质因子、有效模式体积和腔外能量比随器件几何尺寸的变化规律．结果表明，所设计微盘腔具有较低的传播损耗、较强的光场约束能力和较高的腔外能量比，品质因子高达7000，最小模体积仅为0．315μm^3，可实现高灵敏度折射率传感．

英文摘要：

A hybrid plasmonic microcavity consisting of a silicon microdisk which is separated from a silver toroidal strip by a low-permittivity dielectric is proposed to achieve high quality factor as well as small mode volume. Mode properties such as quality factor, effective mode volume and energy ratio have been investigated by employing a finite element method and analyzed considering the different structure geometry. Simulation results reveal that this kind of hybrid microcavity maintains low propagation loss with high quality factor - 7000, high field limits with small mode volume 0. 315 μm3 , high energy ratio and can realize a refractive index sensor with high sensitivity.