将IC芯片粘片机并联焊头机构的各高速运动杆件看作弹性杆件,用运动弹性动力分析的方法建立了机构的弹性动力学方程,并使用Newmark积分法求解出了方程在整个工作空间的弹性位移曲线。根据这些曲线,说明在计算焊头的运动精度和定位精度时,必须考虑焊头的弹性位移。
We treat all the high-speed moving rods of the parallel bonding mechanism of an IC chip die as elastic rods, and build the elastodynamic equation for the mechanism using the kineto-elastodynamic analysis method. Then we work out the elastic displacement curves of the equation in its whole workspaee by using the Newmark integrals. The curves indicate that the elastic displacement of the parallel bonding mechanism must be taken into account when calculating its movement precision and locational precision.