中文摘要：

采用高温硫化处理磁控溅射Mo／Ti金属前驱体薄膜制备Mo硫化物／Ti复合薄膜，采用X射线衍射仪、能谱仪和扫描电子显微镜对复合薄膜的组织结构、化学成分和表面形貌进行分析，采用涂层附着力自动划痕仪和可控气氛球．盘式摩擦磨损试验仪分别测试薄膜与基体的结合力以及摩擦系数，并用扫描电子显微镜观察薄膜的磨损表面形貌，分析其磨损机制．结果表明：硫化温度在450℃以上时能够生成较多Mo硫化物，最佳硫化工艺为450℃×15h；提高硫化温度或延长硫化时间均使薄膜的结合力下降；磁控溅射Mo／Ti前驱体复合薄膜经450℃×15h硫化处理后，薄膜中生成复杂的Mo硫化物，形成Mo硫化物／Ti复合薄膜；与纯Mo薄膜硫化后相比，Mo硫化物／Ti复合薄膜具有更高的界面结合力和更优异的摩擦磨损性能．

英文摘要：

Mo sulfide/Ti composite films were prepared by sulfurizing precursor Mo/Ti films, which were deposited on medium carbon steel substrate by magnetron sputtering. The microstructure, chemical component and morphology of the films were characterized by X-ray diffraction, energy dispersive X-ray spectroscopy and scanning electron microscopy. The adhesion of the film to the substrate was determined by scratch test. The tribological behavior was investigated using a ball-on-disk tribometer in vacuum and in humid air, and the worn surface was characterized by scanning electron microscopy to evaluate the wear resistance of the films. A large amount of Mo sulfide was formed at sulfurizing temperature above 450℃. The optimum sulfurizing process was at 450 ℃ for 15 h. An increase of sulfurizing temperature or sulfurizing duration deteriorated the adhesion of the film. Mo sulfide/Ti composite films could be prepared by sulfurizing precursor Mo/Ti films at 450℃ for 15 h. Compared with Mo sulfide films prepared by sulfurizing precursor pure Mo films, the Mo sulfide/Ti composite films exhibited better interface bonding strength and tribological properties.