Contributions of N+, N-2(+), NO+ Ion Implantation to p-Type Conversion of ZnO:Al Films
- ISSN号:0093-3813
- 期刊名称:IEEE Transactions on Plasma Science
- 时间:0
- 页码:711-716
- 相关项目:等离子体浸没离子注入制备P型ZnO薄膜材料的研究
作者:
Li, Zebin|Gao, Huanzhong|Liang, Rongqing|Ou, Qiongrong|Zhang, Shuyu|He, Long|Chang, Xijiang|Wu, Xiaojing|Wu, Zhonghang|He, Zhijiang|