中文摘要：

研制了一台新型直线超声电机，测定了电机的频率一速度关系、相位一速度关系。基于DDS技术设计的驱动器能产生两相可调频率、可调相位差及可调幅值的正弦信号。采用调相、调频综合控制方法，构建了直线超声电机驱动的全数字位置控制平台。该平台可达到5μm的定位精度。

英文摘要：

This paper presented a new type linear ultrasonic motor. Driving experiments were performed to measure the relations between frequency- speed, phase- speed. The driving- controller using DDS（digital direct frequency synthesis） technology can produce two phase sinusoidal signals, the frequencies, phase differences and amplitudes of them can all be adjusted. By adjusting-frequency and adjusting-phase, the linear ultrasonic motor can attain 5μm position precision.