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中文摘要：
为了提高KDP晶体的表面质量，减少清洗时新损伤的引入，降低清洗过程对抛光后晶体表面质量的影响，本文采用超声波、酒精棉、擦镜纸以及酒精棉与擦镜纸相结合的方法，对抛光后的KDP晶体表面进行了清洗。利用光学显微镜对不同清洗方法得到的表面质量进行检测对比。结果表明，酒精棉与擦镜纸相结合进行清洗为较理想的清洗方法，可以有效防止清洗中存在的表面潮解及新划痕的引入，清洗后的抛光表面粗糙度Ra为2.152nm。
英文摘要：
In order to reduce other damage during surface cleaning and decrease the influence of cleaning to surface quality so that to improve surface quality of KDP crystal, polished surface of KDP crystal was cleaned with ultrasonic, lens paper, alcohol cotton and alcohol cotton combined with lens paper. Surface quality of crystal after cleaned with different methods was contrasted by optical microscope. The results indicate the method that cleaning with alcohol cotton combined with lens paper is an ideal method and can prevent deliquescence of surface and avoid generation of new scratch which were usual during other surface cleaning methods. Surface roughness of polished surface of KDP crystal cleaned with alcohol cotton combined with lens paper Ra is 2. 152 nm.
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