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Controllable shrinking and shaping of silicon nitride nanopores under electron irradiation
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：0
  • 页码：7800-7805
  • 语言：英文
  • 相关项目：荷能重离子径迹刻蚀法制备硅基膜纳米孔道
作者： Xu, J.|Zhang, Y.|Ji, H.|Ouyang, Q.|Li, J.|Xue, J. M.|Zhang, W. M.|Wang, Y. G.|
同期刊论文项目
荷能重离子径迹刻蚀法制备硅基膜纳米孔道
期刊论文 8
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