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Evolution of residual stress in Cu-line patterns with different linewidth
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：0
  • 页码：609-614
  • 语言：英文
  • 相关项目：纳米晶复合超硬薄膜极限硬度的微量氧损伤行为及其机制研究
作者： 徐可为|王剑峰|马大衍|
同期刊论文项目
纳米晶复合超硬薄膜极限硬度的微量氧损伤行为及其机制研究
期刊论文 14 会议论文 2 专利 1
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