本文主要采用甚高频等离子体增强化学气相沉积技术制备了不同硅烷浓度、辉光功率和反应气体流量的单结微晶硅薄膜太阳电池。电池的I-V测试结果表明:电池的开路电压随功率的降低、硅烷浓度和气体流量的增加而增加,而对应的短路电流密度在一定的硅烷浓度条件下达到最大,填充因子也在逐渐的增加。文中对具体内容进行了详细的分析。
Series of microcrystalline silicon solar ceils were fabricated by very high frequency plasma enhanced chemical vapor deposition at different silane concentrations, discharge powers and total flow rate. The results of I-V measurements of solar ceils indicate that the open circuit voltage ( Voc ) and the fill factor (FF) increase with the decrease of discharge power, and with the increase of silane concentration and total flow rate. However, the short circuit current density (Jsc) reached a maximum at a certain silane concentration. The details can be seen in the paper.