中文摘要：

为解决基于有机衬底的传统光波导传感器灵敏度低的问题,提出了基于聚合物材料的高灵敏度MZI（Mach-Zehnder Interferometer）波导的传感器结构,从理论上设计了对称形MZI和非对称形MZI的高灵敏度波导传感器结构。得到对称型MZI形波导传感器折射率在1.34~1.36、1.36~1.38和1.38~1.40区间内灵敏度分别为1 850.76 d B/RIU、1995.09 d B/RIU和1 547.30 d B/RIU。圆弧型非对称型MZI波导传感器折射率在1.33~1.35、1.35~1.38和1.38~1.40区间内灵敏度分别为1 719.23 d B/RIU、1 251.68 d B/RIU和2 065.22 d B/RIU。对这两种传感器结构,通过多个波导传感器相集成的设计,可实现材料在折射率1.33~1.40区间内的高灵敏度传感。

英文摘要：

In order to solve the problem of the low sensitivity of the traditional waveguide sensor based on organic substrate,the MZI（ Mach-Zehnder Interferometer） waveguide sensing structure of high sensitivity based on polymer materials is proposed,and two high sensitivity waveguide sensing structure with symmetric MZI and asymmetric MZI is designed. The sensitivity of the optimized symmetric MZI waveguide sensor in the interval 1. 34 ~ 1. 36,1. 36 ~ 1. 38,1. 38 ~ 1. 40 are 1 850. 76 d B/RIU, 1 995. 09 d B/RIU,1 547. 30 d B/RIU. The sensitivity of the optimizedasymmetric MZI waveguide sensor in the interval 1. 33 ~1. 35,1. 35 ~ 1. 38,1. 38 ~ 1. 40 are 1 719. 23 d B/RIU,1 251. 68 d B/RIU,2 065. 22 d B/RIU. For the two sensing structure,the high sensing accuracy in 1. 33 ~ 1. 40 can be realized by the design of integrated waveguide sensors.