中文摘要：

本文在不同条件下进行了选择性氧化实验，从中获得被氧化样品的微观结构图片和不同氧化深度处的各组分含量．由于氧化速率主要受扩散控制的影响，因而本研究运用扩散动力学方法对实验结果进行分析．所推导出氧化规律的数学拟合曲线与实验所得数据基本吻合，从而得出垂直腔面发射激光器氧化剂浓度随氧化深度的增加呈现指数衰减的规律．

英文摘要：

This research is based on the selective oxidation experiments under different conditions,in which the microstructure pictures and the component contents of the produced oxide in different depths are obtained. The oxidation rate is mainly controlled by diffusion;therefore,the experimental results are analyzed with the kinetics of thermal diffusion. It shows that the results of mathematical derivation are basically in agreement with the experimental results. Thus it is concluded that the concentration of oxidant is exponentially declined as the depth of oxidation in vertical cavity surface emitting lasers increases.