中文摘要：

科技发展需要对各种纳米测量仪器的“纳米”确定性进行检定.介绍了一种基于MSP430F149单片机的Fabry-Parot腔双频高阶弱回馈位移测量系统条纹宽度标定方法,通过计算出测量靶镜运动同一位移时高阶回馈纳米条纹与传统弱回馈半波长条纹的频率之比,精确地标定出激光高阶弱回馈纳米位移测量系统的光学分辨率.测量结果表明系统可溯源的光学分辨率为10.37 mn,加入20倍电细分后系统最终的分辨率为0.53 mn.

英文摘要：

The development of science and technology need to calibrate the certainty of nanometer measurement instruments.A method is proposed to calibrate the nano fringe width of the dual frequency high-order weak feedback displacementmeasuring system based on Fabry-Parot cavity. By using the microcontroller MSP430F149, which can measurethe ratio of frequency between high-order feedback nano fringe and the traditional weak feedback half wavelengthfringe when adding a same displacement on the two target mirrors. As a result,the optical resolution of nanometer displacementmeasuring system can be calibrated accurately. The measurement results show that optical resolution of thesystem can be 10. 37 nm, which is traceable to light wavelength. By adding 20 times electrical subdivision,the finalresolution of this system is about 0. 53 nm.