中文摘要：

针对微球移相干涉测量中系统校准差及离焦引入的线性移相误差对相位信息提取产生的影响及特点,在分析了常用移相算法应用缺陷的基础上,构造了新的五帧算法。该算法对线性移相误差的响应特性与Hariharan算法十分接近,且符号相反。通过两种算法的互补修正,使得相位解算误差理论上较之Hariharan算法降低了两个数量级,大幅提高了定步长移相算法的线性误差抑制能力,且避免出现类似任意步长算法奇异相位解的异常情况,运算更为简洁。最后通过测量实验验证了提出的误差互补修正相位提取方法的可行性和有效性。

英文摘要：

In order to measure the surface topography of microsphere with phase-shifting interferometer in high precision, phase extraction method is of great important. But there is always linear phase shifting error existence coming from system calibration error or defocus, which influences the phase extracting accuracy. The common phase shifting algorithms are not quite suitable for the measurement of sphere, especially when the linear error is larger, so a new five frames algorithm is constructed. The response characteristics of new algorithm is much close to Hariharan algorithm, but is opposite in sign. Therefore, by the complementray correction of the two algorithms, the phase calculation error is reduced by two orders of magnitude. The capacity of fLxed-step algorithm for linear phase shifting error control is improved greatly and there is no abnormal phase result coming out, which always appears in the calculation process by any equal step algotithm. The algorithm based on phase error complementary correction is much more compact for calculations, its feasibility and effectiveness are proved by the actual measurement experiment of a microsphere.