中文摘要：

为满足超精密工件台结构极高的静动性能要求，提出了一种基于目标分层的多目标结构拓扑优化方法，并将其应用于超精密工件台关键件的结构优化设计中。基于ANSYS的仿真实验结果表明，多目标结构拓扑优化方法能够有效地提高结构的静动性能和设计效率，满足超精密结构极高的性能要求，为现代工程结构的多目标优化设计和改进提供了理论依据和方法。

英文摘要：

Based on the topological-optimization and layered decision--making theory of multi- objective optimization, a new methodology of multi-objective topological optimization design （MO-TOD） was proposed, and the method was applied in the optimization design of structures in the key unit of ultra-precision stages. The simulation results based on ANSYS prove that MOTOD significantly improve the static characteristics, dynamic characteristics and the design efficiency of multi- objective structure optimization design, satisfies the rigorous requirements in performance of ultraprecision structures, and provides a theoretical guide and method for modern structure design and improvement.