中文摘要：

该文分析了基于双压电膜驱动微小机器人的惯性冲击式运动原理，建立了机器人压电振子的等效电学模型，采用有限元法对双压电膜驱动器进行模态分析，确定了微小型机器人运动的激励信号频率，并求解了双压电膜等效电学模型中的电学参数。在此基础上对该微小机器人进行了实验测试，结果表明，机器人最高速度为200mm／min，最大输出力为0．1N。

英文摘要：

The impact drive mechanism （IDM） of the micro robot based on piezoelectric bimorph actuator was analyzed in this paper. The equivalent eleetrical model of the piezoelectric bimorph actuator was established,and the Finite Element Method （FEM） was used for model analysis. The electrical and actuating signal frequency parame- ters of the bimorph actuator were obtained by using FEM. Experiments were carried out to evaluate the micro robot＇s velocity and force,and experiment results showed a good motion feature.